The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Sep. 09, 2010
Martin Ernst Tollner, Eastbourne, GB;
Martin Ernst Tollner, Eastbourne, GB;
Edwards Limited, Crawley, West Sussex, GB;
Abstract
The present invention provides a vacuum pump () which comprises a turbo-molecular pumping mechanism () in series with a Siegbahn pumping mechanism (). A first pump inlet () is provided through which gas can pass through both the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism. Additionally, an inter-stage (inlet) is provided through which gas can enter the pump at a location between the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism and pass only through the Siegbahn pumping mechanism. There are flow channels () in a first plurality of stages () of the Siegbahn pumping mechanism which are in fluid communication with the inter-stage inlet () and gas entering the pump through the inter-stage inlet is pumped in parallel along said flow channels.