The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Feb. 25, 2013
Luxvue Technology Corporation, Santa Clara, CA (US);
Dariusz Golda, Redwood City, CA (US);
John A. Higginson, Santa Clara, CA (US);
Andreas Bibl, Los Altos, CA (US);
Paul Argus Parks, Austin, TX (US);
Stephen Paul Bathurst, Lafayette, CA (US);
LuxVue Techonology Corporation, Santa Clara, CA (US);
Abstract
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.