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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9306533 B1

PDFFull Text
Date of Patent:
Apr. 05, 2016

Filed:

Jun. 09, 2015

Rf impedance matching network

Applicant:

Reno Technologies, Inc., Wilmington, DE (US);

Inventor:

Anton Mavretic, Natick, MA (US);

Assignee:

RENO TECHNOLOGIES, INC.;

Attorney:

The Belles Group, P.C.

Primary Examiner:

Stephen E Jones

Int. Cl.
CPC ...
H03H 7/38 (2006.01); G01R 27/26 (2006.01); G01R 27/28 (2006.01); H01L 21/66 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); H03H 7/40 (2006.01);
U.S. Cl.
CPC ...
H03H 7/38 (2013.01); G01R 27/2605 (2013.01); G01R 27/28 (2013.01); H01L 21/0262 (2013.01); H01L 21/02274 (2013.01); H01L 21/28556 (2013.01); H01L 21/3065 (2013.01); H01L 21/31116 (2013.01); H01L 21/31138 (2013.01); H01L 21/32136 (2013.01); H01L 22/20 (2013.01); H03H 7/40 (2013.01);
Abstract

An RF impedance matching network includes a transformation circuit configured to provide a transformed impedance; a first shunt circuit in parallel to the RF input, the first shunt circuit including a first shunt variable capacitance component comprising (a) a plurality of first shunt capacitors coupled in parallel, and (b) a plurality of first shunt switches coupled to the plurality of first shunt capacitors and configured to connect and disconnect each of the plurality of first shunt capacitors to a first virtual ground; and a second shunt variable capacitance component including (a) a plurality of second shunt capacitors coupled in parallel, and (b) a plurality of second shunt switches coupled to the plurality of second shunt capacitors and configured to connect and disconnect each of the plurality of second shunt capacitors to a second virtual ground.

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