The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2016

Filed:

Aug. 09, 2012
Applicants:

Susumu Takada, Otsu, JP;

Emi Kuraseko, Otsu, JP;

Motoyuki Suzuki, Otsu, JP;

Inventors:

Susumu Takada, Otsu, JP;

Emi Kuraseko, Otsu, JP;

Motoyuki Suzuki, Otsu, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 33/58 (2010.01); H01L 33/22 (2010.01); C30B 33/08 (2006.01); B32B 37/00 (2006.01); B32B 38/10 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 33/58 (2013.01); B32B 37/025 (2013.01); B32B 38/10 (2013.01); C30B 33/08 (2013.01); H01L 33/22 (2013.01); B32B 2310/0831 (2013.01); B32B 2323/00 (2013.01); B32B 2333/00 (2013.01); B32B 2361/00 (2013.01); B32B 2379/08 (2013.01); B32B 2457/20 (2013.01); H01L 33/005 (2013.01); H01L 2933/0058 (2013.01);
Abstract

A method of producing the crystalline substrate having a concave-convex structure includes: (A) forming a transfer film by forming a concave-convex film on a support film on the surface having a concave-convex pattern thereon so that thickness of the residual film of the concave-convex film is 0.01 to 1 μm, the concave-convex pattern of the support film having concave parts with a width of 0.05 to 100 μm, a depth of 0.05 to 10 μm, and a ratio of the depth of the concave part to the width of the concave part of up to 1.5, (B) disposing the transfer film on the crystalline substrate, and transferring the concave-convex film onto the crystalline substrate to produce a crystalline substrate having the concave-convex film thereon, (C) etching the crystalline substrate having the concave-convex film thereon to form a concave-convex structure on the surface of a crystalline substrate.


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