The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2016

Filed:

Dec. 18, 2012
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Hiroto Tomioka, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/00 (2006.01); H01L 33/00 (2010.01); H01L 31/16 (2006.01); H01L 31/09 (2006.01); H01L 27/144 (2006.01); G01S 17/89 (2006.01); H01L 27/146 (2006.01); G01N 21/3581 (2014.01); G01S 13/89 (2006.01);
U.S. Cl.
CPC ...
H01L 33/0004 (2013.01); G01S 17/89 (2013.01); H01L 27/1446 (2013.01); H01L 27/14603 (2013.01); H01L 27/14625 (2013.01); H01L 31/09 (2013.01); H01L 31/16 (2013.01); G01N 21/3581 (2013.01); G01S 13/89 (2013.01);
Abstract

A photoconductive antenna is adapted to generate terahertz waves when irradiated by pulsed light. The photoconductive antenna includes first and second conductive layers, a semiconductor layer positioned between the first and second conductive layers, first and second electrodes, and a dielectric layer. The semiconductor layer is made of a semiconductor material having a carrier density that is lower than a carrier density of the semiconductor material of the first conductive layer or the second conducive layer. The first and second electrodes are electrically connected to the first and second conductive layers, respectively. The second electrode has an aperture through which the pulsed light passes. The dielectric layer is made of a dielectric material, and is in contact with a surface of the semiconductor layer having a normal direction extending orthogonal to a lamination direction of the first conductive layer, the semiconductor layer, and the second conductive layer.


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