The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Jul. 02, 2015
Applicant:
Dmg Mori Seiki Co., Ltd., Yamato-Koriyama, Nara, JP;
Inventors:
Assignee:
DMG MORI SEIKI CO., LTD., Nara, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01D 5/26 (2006.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02015 (2013.01); G01B 11/026 (2013.01); G01D 5/266 (2013.01);
Abstract
A first light flux serving as object light is caused to enter a member to be measured, and reflected light thereof is caused to enter again the member to be measured after being diffracted by a first diffraction grating. Then, the second-time reflected light of the first light flux by the member to be measured is diffracted by a second diffraction grating. By diffracting the first light flux by the second diffraction grating, a change of the optical path length caused by tilting of the member to be measured is cancelled.