The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Jan. 13, 2011
Paul Shufflebotham, San Jose, CA (US);
Robert Martinson, Palo Alto, CA (US);
Heinrich Von Bunau, San Jose, CA (US);
Kevin Lynch, Santa Clara, CA (US);
Mathew Sheffield, San Ramon, CA (US);
Paul Shufflebotham, San Jose, CA (US);
Robert Martinson, Palo Alto, CA (US);
Heinrich von Bunau, San Jose, CA (US);
Kevin Lynch, Santa Clara, CA (US);
Mathew Sheffield, San Ramon, CA (US);
APOLLO PRECISION KUNMING YUANHONG LIMITED, Kunming, CN;
Abstract
A deposition apparatus includes an input spool located in non-vacuum input module, at least one vacuum process module, an accumulator, and an air to vacuum sealing mechanism. The accumulator and the sealing mechanism are configured to continuously provide a web substrate from the input spool at atmosphere into the at least one process module at vacuum without stopping the web substrate.