The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Aug. 16, 2011
James H. Burge, Tucson, AZ (US);
Dae Wook Kim, Tucson, AZ (US);
James H. Burge, Tucson, AZ (US);
Dae Wook Kim, Tucson, AZ (US);
Arizona Board of Regents on Behalf of the University of Arizona, Tucson, AZ (US);
Abstract
In a non-conventional lap tool, i.e., not a stiff tool nor a conformable tool, and related method for grinding/polishing a substrate surface, includes a rigid base plate and attached work surface to define a cavity containing a non-Newtonian fluid. The non-Newtonian fluid behaves as a solid when the work surface is subjected to high shear stress, i.e., rapid tool stroke, yet behaves like a liquid when the tool is moved around the substrate surface when the shear stress of the work surface is low. A diaphragm can be used to further define the cavity and to seal within the non-Newtonian fluid therein.