The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Aug. 22, 2014
Air Products and Chemicals, Inc., Allentown, PA (US);
Philip Bruce Henderson, Allentown, PA (US);
Richard Paul Underwood, Allentown, PA (US);
AIR PRODUCTS AND CHEMICALS, INC., Allentown, PA (US);
Abstract
A pressure-swing adsorption process for producing a purified nitrogen trifluoride (NF) product gas from a feed gas contaminated with carbon tetrafluoride (CF) using a column packed with an adsorbent that exhibits selectivity for NFover CF. The process separates the feed gas into a first product gas having a greater concentration of CFthan the feed gas and a second product gas having a lesser concentration of CFwithout the use of an inert carrier gas while recovering essentially all of the NF. The process includes filling the column with the feed gas until the column reaches a first pressure, removing the first product gas, and then removing the second product gas, where after the second product gas is removed the column is at a second pressure. A rinse gas of NFand CFmay be used to remove the first product gas or the second product gas.