The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2016
Filed:
Jul. 12, 2013
Applicant:
Silicon Laboratories Inc., Austin, TX (US);
Inventors:
Emmanuel P. Quevy, El Cerrito, CA (US);
Daniel N. Koury, Jr., Mesa, AZ (US);
Assignee:
Silicon Laboratories Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/30 (2006.01); H02N 1/00 (2006.01); H03L 1/02 (2006.01); H03H 3/013 (2006.01); H03H 9/02 (2006.01); H03H 7/00 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
H02N 1/00 (2013.01); H03B 5/30 (2013.01); H03H 3/013 (2013.01); H03H 9/02259 (2013.01); H03L 1/02 (2013.01); H03H 2007/006 (2013.01); H03H 2009/0248 (2013.01); H03H 2009/02291 (2013.01); H03H 2009/02385 (2013.01); H03H 2009/2442 (2013.01); Y10T 29/49005 (2015.01); Y10T 29/49117 (2015.01);
Abstract
A technique decouples a MEMS device from sources of strain by forming a MEMS structure with suspended electrodes that are mechanically anchored in a manner that reduces or eliminates transfer of strain from the substrate into the structure, or transfers strain to electrodes and body so that a transducer is strain-tolerant. The technique includes using an electrically insulating material embedded in a conductive structural material for mechanical coupling and electrical isolation.