The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2016
Filed:
Mar. 06, 2015
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Toma Yorisaki, Tokyo, JP;
KABUSHIKI KAISHA TOSHIBA, Minato-ku, JP;
Abstract
A sputter neutral particle mass spectrometry apparatus includes a sample table holding a sample which is a mass spectrometry target, and comprising a temperature control mechanism for the sample, an ion beam irradiation device which irradiates an ion beam on the sample to generate neutral particles, a laser irradiation device which irradiates the neutral particles with a laser to obtain photoexcited ions, a mass spectrometer which draws in the drawn out photoexcited ions and performs mass analysis, a driving system mirror which is provided retractably on a laser light path between the laser irradiation device and the sample table, and reflects the laser when positioned within the laser light path, and, a profiler which is arranged in a reflective direction of the driving system mirror and detects a feature of the laser.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile