The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2016
Filed:
Oct. 05, 2012
Applicants:
Nikon Corporation, Tokyo, JP;
Lorri L. Watson, Campbell, CA (US);
Inventor:
Douglas C. Watson, Campbell, CA (US);
Assignee:
Nikon Corporation, , JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B64C 17/06 (2006.01); G03B 27/32 (2006.01); G03B 27/58 (2006.01); G03B 27/62 (2006.01); H02K 41/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03B 27/58 (2013.01); G03F 7/70716 (2013.01); G03F 7/70766 (2013.01);
Abstract
A reaction assemblyfor a stage assemblythat moves a devicealong a first axis includes a base countermassand a first transverse countermassThe stage assemblyincludes a stageand a stage moverthat includes a moving componentthat is coupled to the stageand a reaction componentthat is secured to the base countermassThe first transverse countermassis guided to allow for movement along a first transverse axisand the first transverse countermassis coupled to the base countermassso that movement of the base countermassalong the first axis causes the first transverse countermassto move along the first transverse axis