The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2016

Filed:

Aug. 13, 2013
Applicant:

Hitachi-lg Data Storage, Inc., Minato-ku, Tokyo, JP;

Inventor:

Shigeharu Kimura, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/00 (2006.01); G02B 7/09 (2006.01); G01N 21/25 (2006.01); G02B 21/00 (2006.01); G02B 21/24 (2006.01); G01N 21/65 (2006.01);
U.S. Cl.
CPC ...
G02B 7/09 (2013.01); G01N 21/255 (2013.01); G01N 21/65 (2013.01); G02B 21/0032 (2013.01); G02B 21/0052 (2013.01); G02B 21/245 (2013.01); G01N 2021/653 (2013.01);
Abstract

For an optical device as a transmission-type scanning optical microscope having a pinhole or a slit for limiting the amount of a detected light beam, a method of moving a scanning beam without moving an observation sample to be scanned is realized. A scanning beam from a beam scanning mechanism that has passed through an observation sample is focused onto a reflection plate, and is then returned back again to the observation sample. A light beam that has returned back from the sample is further fed back to the beam scanning mechanism, and then, the light beam that has been limited through a fixed pinhole or a slit is detected with a photodetector.


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