Single layer 3d tracking semiconductor detector

Abstract

The present invention relates to a pixel detector (), comprising a semiconductor sensor layer (), in which charges can be generated upon interaction with particles to be detected. The semiconductor layer defines an X-Y-plane and has a thickness extending in Z-direction. The detector further comprises a read-out electronics layer () connected to said semiconductor layer (), said read-out electronics layer () comprising an array of read-out circuits () for detecting signals indicative of charges generated in a corresponding volume of said semiconductor sensor layer (). The neighboring read-out circuits () are connected by a relative timing circuit configured to determine time difference information between signals detected at said neighboring read-out circuits (). The time difference information is indicative of a difference in the Z-components of the locations of charge generations in the corresponding neighboring sensor volumes caused by a particle trajectory that is inclined with respect to the X-Y-plane.