The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2016
Filed:
Sep. 20, 2011
Applicants:
Fumitaka Arai, Mie, JP;
Wataru Sakamoto, Mie, JP;
Fumie Kikushima, Mie, JP;
Hiroyuki Nitta, Mie, JP;
Inventors:
Fumitaka Arai, Mie, JP;
Wataru Sakamoto, Mie, JP;
Fumie Kikushima, Mie, JP;
Hiroyuki Nitta, Mie, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/788 (2006.01); H01L 21/28 (2006.01); H01L 29/792 (2006.01); H01L 29/423 (2006.01); H01L 21/764 (2006.01); H01L 27/115 (2006.01); H01L 29/66 (2006.01); H01L 21/762 (2006.01); H01L 21/768 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42336 (2013.01); H01L 21/764 (2013.01); H01L 27/11524 (2013.01); H01L 21/7682 (2013.01); H01L 21/76224 (2013.01); H01L 21/823481 (2013.01); H01L 27/115 (2013.01); H01L 27/1157 (2013.01); H01L 27/11519 (2013.01); H01L 27/11529 (2013.01); H01L 27/11565 (2013.01); H01L 29/66825 (2013.01); H01L 29/788 (2013.01); H01L 29/7881 (2013.01);
Abstract
According to one embodiment, a part of a buried insulating film buried in a trench is removed; accordingly, an air gap is formed between adjacent floating gate electrodes in a word line direction, and the air gap is formed continuously along the trench in a manner of sinking below a control gate electrode.