The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 22, 2016

Filed:

Aug. 21, 2013
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Seong-Min Wang, Yongin, KR;

Mu-Gyeom Kim, Yongin, KR;

Tae-An Seo, Yongin, KR;

Gug-Rae Jo, Yongin, KR;

Dae-Young Lee, Yongin, KR;

Jung-Gun Nam, Yongin, KR;

Dae-Hwan Jang, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01); H01L 29/786 (2006.01); H01L 49/02 (2006.01); H01L 27/12 (2006.01); H01L 27/32 (2006.01); G02F 1/1362 (2006.01);
U.S. Cl.
CPC ...
H01L 28/88 (2013.01); H01L 27/1255 (2013.01); H01L 27/3265 (2013.01); G02F 1/136213 (2013.01);
Abstract

Provided is a method of manufacturing a capacitor of a display apparatus, the display apparatus being formed on a substrate and including a thin film transistor, which includes an active layer, a gate electrode, and source and drain electrodes, a display device connected to the thin film transistor, and the capacitor, the method including: forming an electrode layer on the substrate; forming a passivation layer on the electrode layer; patterning the passivation layer to form a first pattern including first branch patterns parallel to each other, and a second pattern including second branch patterns parallel to each other and interposed between the first branch patterns; and forming first and second electrodes by etching the electrode layer using the first and second patterns as masks.


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