The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 22, 2016

Filed:

Jun. 04, 2013
Applicants:

Juergen Steiger, Taipei, TW;

Dennis Fruehling, Marl, DE;

Alexey Merkulov, Recklinghausen, DE;

Arne Hoppe, Herne, DE;

Inventors:

Juergen Steiger, Taipei, TW;

Dennis Fruehling, Marl, DE;

Alexey Merkulov, Recklinghausen, DE;

Arne Hoppe, Herne, DE;

Assignee:

EVONIK DEGUSSA GmbH, Essen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/02 (2006.01); H01L 21/02 (2006.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01); H01L 31/18 (2006.01); C07F 5/00 (2006.01); H01L 21/477 (2006.01); H01L 29/24 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02565 (2013.01); C07F 5/003 (2013.01); C23C 18/1216 (2013.01); C23C 18/1295 (2013.01); C23C 18/14 (2013.01); H01L 21/02628 (2013.01); H01L 21/477 (2013.01); H01L 29/24 (2013.01); H01L 31/1884 (2013.01); C23C 18/1254 (2013.01); C23C 18/1279 (2013.01); Y02E 10/50 (2013.01);
Abstract

The present invention relates to a fluid phase method for producing indium oxide-containing layers, in which a composition comprising at least one indium oxo-alkoxide of the generic formula MO(OR)[O(R'O)H]XY[R″OH]with x=3-25, y=1-10, z=3-50, a=0-25, b=0-20, c=1-20, d=0-25, e=0, 1, M=In, R, R′, R″=organic remainder, X═F, Cl, Br, I, and Y═—NO, —NO, where b+c is =1-20 and at least one solvent is applied to a substrate, optionally dried, and converted into an indium oxide-containing layer, to the indium oxo-alkoxides of the indicated generic formula, to coating compositions comprising said indium oxo-alkoxides, to layers that can be produced by means of the method according to the invention, and to the use of said layers.


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