The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 22, 2016

Filed:

Aug. 23, 2012
Applicants:

Mária Csete, Szeged, HU;

Áron Sipos, Szeged, HU;

Anikó Szalai, Szeged, HU;

Inventors:

Mária Csete, Szeged, HU;

Áron Sipos, Szeged, HU;

Anikó Szalai, Szeged, HU;

Assignee:

University of Szeged, Szeged, HU;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/16 (2006.01); G02B 5/18 (2006.01); H01L 21/027 (2006.01); G03H 1/04 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70408 (2013.01); G02B 5/1809 (2013.01); G03F 7/168 (2013.01); H01L 21/027 (2013.01); G03F 2007/2067 (2013.01); G03H 2001/0441 (2013.01);
Abstract

The present invention relates to a method for microstructuring a substrate. In the method according to the invention a substrate with a region to be structured is provided, and then by applying colloid spheres into this region, a colloid sphere monolayer is formed. The thus applied colloid sphere monolayer exhibits a certain geometrical symmetry. Said colloid sphere monolayer is then illuminated with a beam of spatially modulated intensity distribution synchronized to said monolayer, thereby performing mechanical structuring in said region in conformity with a desired pattern through concentrating beam intensity via near-field effect behind said colloid sphere monolayer in the propagation direction of light.


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