The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 22, 2016

Filed:

Jul. 10, 2013
Applicants:

Jx Nippon Oil & Energy Corporation, Tokyo, JP;

Tokyo Institute of Technology, Tokyo, JP;

Inventors:

Satoshi Masuyama, Yokohama, JP;

Madoka Takahashi, Tokyo, JP;

Suzushi Nishimura, Yokohama, JP;

Maki Fukuda, Yokohama, JP;

Takashi Seki, Yokohama, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); B29C 33/38 (2006.01); B29C 33/42 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); C25D 1/10 (2006.01); H01L 51/56 (2006.01); B81C 1/00 (2006.01); B82Y 20/00 (2011.01); G03F 7/00 (2006.01); B82Y 10/00 (2011.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
G02B 5/1852 (2013.01); B29C 33/3857 (2013.01); B29C 33/424 (2013.01); B81C 1/00031 (2013.01); B82Y 10/00 (2013.01); B82Y 20/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C25D 1/10 (2013.01); G02B 5/1809 (2013.01); G02B 5/1847 (2013.01); G03F 7/0002 (2013.01); H01L 51/52 (2013.01); H01L 51/56 (2013.01); B81C 2201/0149 (2013.01); H01L 51/5275 (2013.01);
Abstract

A method for producing a mold includes: applying a block copolymer solution made of first and second polymers on a base member; performing a first annealing process at a temperature higher than Tg of the block copolymer after drying the coating film; forming a concavity and convexity structure on the base member by removing the second polymer by an etching process; performing a second annealing process of the concavity and convexity structure at a temperature higher than Tg of the first polymer; forming a seed layer on the structure; laminating or stacking a metal layer on the seed layer by an electroforming; and peeling off the metal layer from the base member. The second annealing process enables satisfactory transfer of a concavity and convexity structure on the base member onto the metal layer.


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