The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 22, 2016

Filed:

Dec. 03, 2013
Applicant:

Honda Motor Co., Ltd., Tokyo, JP;

Inventors:

Toshiyuki Ohashi, Wako, JP;

Toshio Tokune, Wako, JP;

Masahiro Ohta, Wako, JP;

Ryogo Kato, Wako, JP;

Toshiyuki Shima, Tagajo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); B01J 23/78 (2006.01); B01J 37/02 (2006.01); B01J 37/34 (2006.01); B01J 23/745 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); C23C 14/08 (2006.01); C23C 14/18 (2006.01); C23C 14/58 (2006.01);
U.S. Cl.
CPC ...
B01J 23/78 (2013.01); B01J 23/745 (2013.01); B01J 37/0244 (2013.01); B01J 37/342 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C23C 14/5893 (2013.01); C23C 14/081 (2013.01); C23C 14/18 (2013.01); C23C 14/5853 (2013.01);
Abstract

Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growthincludes a base plate, a catalyst, a form-defining material layerwhich allows the catalystto be dispersed and arranged, and a covering layerwhich has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growthincludes a step of sputtering on a base platea metal which forms a catalystand oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate, and a step of further sputtering on the form-defining material a metal which forms a catalystand oxidizing the surface of the metal.


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