The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
Jul. 30, 2013
Applicant:
Western Digital (Fremont), Llc, Fremont, CA (US);
Inventors:
MingLang Yan, Pleasanton, CA (US);
Xiaobo Huang, Irvine, CA (US);
Jian X. Shen, Pleasanton, CA (US);
Assignee:
Western Digital (Fremont), LLC, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); H01L 43/02 (2006.01); H01L 27/22 (2006.01); H01L 43/00 (2006.01); G01R 33/09 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); G01R 33/09 (2013.01); H01L 27/22 (2013.01); H01L 27/222 (2013.01); H01L 43/00 (2013.01); H01L 43/02 (2013.01);
Abstract
A method for fabricating a magnetic tunnel junction (MTJ) is disclosed. The process involves annealing a stack that includes a tunnel barrier layer and cooling the stack under vacuum immediately after annealing. At least one overlayer is deposited on the tunnel barrier layer to form the MTJ.