The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2016

Filed:

Jan. 29, 2013
Applicant:

Panasonic Corporation, Osaka, JP;

Inventors:

Soichiro Hiraoka, Hyogo, JP;

Kazuki Komaki, Osaka, JP;

Shinsuke Nakazono, Osaka, JP;

Akira Kurozuka, Osaka, JP;

Toshiaki Horie, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01); H01L 41/083 (2006.01); H01H 57/00 (2006.01); H01L 41/22 (2013.01); G02B 26/08 (2006.01); G01C 19/5621 (2012.01); G01C 19/5628 (2012.01); H01L 41/09 (2006.01); H01L 41/04 (2006.01); H01L 41/047 (2006.01); H01L 41/053 (2006.01); H01L 41/27 (2013.01); H01L 41/297 (2013.01); B06B 1/06 (2006.01);
U.S. Cl.
CPC ...
H01L 41/083 (2013.01); B06B 1/0603 (2013.01); G01C 19/5621 (2013.01); G01C 19/5628 (2013.01); G02B 26/0858 (2013.01); H01H 57/00 (2013.01); H01L 41/042 (2013.01); H01L 41/0471 (2013.01); H01L 41/053 (2013.01); H01L 41/094 (2013.01); H01L 41/0913 (2013.01); H01L 41/0953 (2013.01); H01L 41/22 (2013.01); H01L 41/27 (2013.01); H01L 41/297 (2013.01); H01H 2057/006 (2013.01); Y10T 29/42 (2015.01);
Abstract

A piezoelectric actuator device includes a vibrator and a driver to vibrate the vibrator. The vibrator includes a lower vibration layer configured to vibrate and an upper vibration layer coupled to an upper surface of the lower vibration layer and configured to vibrate together with the lower vibration layer. The driver includes an upper electrode layer on a lower surface of the lower vibration layer, a piezoelectric layer on a lower surface of the upper electrode layer, and a lower electrode layer on a lower surface of the piezoelectric layer. The lower vibration layer of the vibrator is made of organic material. The upper vibration layer is mainly made of inorganic material. The lower vibration layer has a smaller longitudinal elastic modulus than the upper vibration layer. The piezoelectric actuator device has a large resistance to disturbance vibrations and a large warping amount of the vibrator without increasing power consumption.


Find Patent Forward Citations

Loading…