The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
Jun. 25, 2014
Applicant:
SK Hynix Inc., Icheon, KR;
Inventors:
Yu Jun Lee, Yangsan, KR;
Kyoung Chul Jang, Seongnam, KR;
Assignee:
SK HYNIX INC., Icheon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/265 (2006.01); H01L 29/423 (2006.01); H01L 29/78 (2006.01); H01L 27/105 (2006.01); H01L 29/06 (2006.01); H01L 21/311 (2006.01); H01L 21/768 (2006.01); H01L 27/108 (2006.01); H01L 21/02 (2006.01); H01L 21/8242 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4236 (2013.01); H01L 21/02329 (2013.01); H01L 21/26586 (2013.01); H01L 21/31111 (2013.01); H01L 21/76224 (2013.01); H01L 21/76897 (2013.01); H01L 27/1052 (2013.01); H01L 27/10823 (2013.01); H01L 29/0642 (2013.01); H01L 29/78 (2013.01);
Abstract
A semiconductor device and a method for forming the same are disclosed. The semiconductor device includes an active region, a device isolation film, a first liner nitride film disposed over a lower portion of a sidewall of the active region, and a second liner nitride film disposed over an upper portion of the sidewall of the active region and having a higher density of nitrogen than a density of nitrogen in the first liner nitride film.
Lee, Yu. (2016). Semiconductor device and method for forming the same (U.S. Patent No. 9287374). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9287374
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile