The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2016

Filed:

Mar. 06, 2015
Applicant:

Raytheon Company, Waltham, MA (US);

Inventor:

Cody B. Moody, Frisco, TX (US);

Assignee:

RAYTHEON COMPANY, Waltham, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/46 (2006.01); H01L 21/00 (2006.01); H01L 23/00 (2006.01); H01L 21/56 (2006.01); H01L 23/10 (2006.01); H01L 25/065 (2006.01); H01L 25/00 (2006.01);
U.S. Cl.
CPC ...
H01L 24/83 (2013.01); H01L 21/563 (2013.01); H01L 23/10 (2013.01); H01L 24/03 (2013.01); H01L 24/09 (2013.01); H01L 24/29 (2013.01); H01L 24/32 (2013.01); H01L 24/94 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 2224/04026 (2013.01); H01L 2224/05551 (2013.01); H01L 2224/05555 (2013.01); H01L 2224/05568 (2013.01); H01L 2224/26135 (2013.01); H01L 2224/29023 (2013.01); H01L 2224/29035 (2013.01); H01L 2224/2957 (2013.01); H01L 2224/29562 (2013.01); H01L 2224/29609 (2013.01); H01L 2224/29611 (2013.01); H01L 2224/29624 (2013.01); H01L 2224/29644 (2013.01); H01L 2224/29686 (2013.01); H01L 2224/32055 (2013.01); H01L 2224/32148 (2013.01); H01L 2224/32502 (2013.01); H01L 2224/32506 (2013.01); H01L 2224/8309 (2013.01); H01L 2224/8314 (2013.01); H01L 2224/83054 (2013.01); H01L 2224/83139 (2013.01); H01L 2224/83191 (2013.01); H01L 2224/83192 (2013.01); H01L 2224/83805 (2013.01); H01L 2224/83815 (2013.01); H01L 2224/83825 (2013.01); H01L 2224/83948 (2013.01); H01L 2224/94 (2013.01); H01L 2924/01032 (2013.01); H01L 2924/01322 (2013.01);
Abstract

Hermetically sealed semiconductor wafer packages that include a first bond ring on a first wafer facing a complementary surface of a second bond ring on a second wafer. The package includes first and second standoffs of a first material, having a first thickness, formed on a surface of the first bond ring. The package also includes a eutectic alloy (does not have to be eutectic, typically it will be an alloy not specific to the eutectic ratio of the elements) formed from a second material and the first material to create a hermetic seal between the first and second wafer, the eutectic alloy formed by heating the first and second wafers to a temperature above a reflow temperature of the second material and below a reflow temperature of the first material, wherein the eutectic alloy fills a volume between the first and second standoffs and the first and second bond rings, and wherein the standoffs maintain a prespecified distance between the first bond ring and the second bond ring.


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