The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2016

Filed:

Dec. 28, 2011
Applicants:

Agnes Neves Woo, Encino, CA (US);

Pascal Tran, Irvine, CA (US);

Akira Ito, Irvine, CA (US);

Guang-jye Shiau, Irvine, CA (US);

Chao-yang LU, Sunnyvale, CA (US);

Jung Wang, Laguna Niguel, CA (US);

Inventors:

Agnes Neves Woo, Encino, CA (US);

Pascal Tran, Irvine, CA (US);

Akira Ito, Irvine, CA (US);

Guang-Jye Shiau, Irvine, CA (US);

Chao-Yang Lu, Sunnyvale, CA (US);

Jung Wang, Laguna Niguel, CA (US);

Assignee:

Broadcom Corporation, Irvine, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 27/02 (2006.01); H01L 27/01 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5223 (2013.01); H01L 23/522 (2013.01); H01L 23/5222 (2013.01); H01L 23/5225 (2013.01); H01L 27/0207 (2013.01); H01L 28/90 (2013.01); H01L 27/016 (2013.01); H01L 28/86 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Embodiments described herein provide a structure for finger capacitors, and more specifically metal-oxide-metal ('MOM') finger capacitors and arrays of finger capacitors. A plurality of Shallow Trench Isolation (STI) formations is associated with every other column of capacitor fingers, with poly fill formations covering the STI formations to provide a more robust and efficient structure.


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