The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
Jan. 15, 2014
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Abstract
The electrostatic chucking deviceof the invention includes an electrostatic chucking portionwhich includes a plate-like body, a top surfaceof which is used as a mounting surface that mounts a plate-like specimen W, an electrostatic adsorption electrodeprovided in the plate-like bodyand a power-feeding terminalthat applies a direct-current voltage to the electrostatic adsorption electrode; and a base portionthat supports the electrostatic chucking portion, in which the plate-like bodyis a corrosion-resistant ceramic, a circular insulation memberis provided in a circumferential edge portion between the electrostatic chucking portionand the base portion, and a heat radiation plateis provided on the top surfaceof the base portion