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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9287155 B1

PDFFull Text
Date of Patent:
Mar. 15, 2016

Filed:

Jun. 28, 2012

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

Applicants:

Ja Yul Kim, Seoul, KR;

Sang Don Jang, Suwon-si, KR;

Tae Kyu Son, Seongnam-si, KR;

Inventors:

Ja Yul Kim, Seoul, KR;

Sang Don Jang, Suwon-si, KR;

Tae Kyu Son, Seongnam-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:

H.C. Park & Associates, PLC

Primary Examiner:

David Bryant

Assistant Examiner:

Bayan Salone

Int. Cl.
CPC ...
H01L 21/68 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); G03F 7/707 (2013.01); G03F 7/70775 (2013.01); Y10T 29/49998 (2015.01); Y10T 29/53013 (2015.01); Y10T 29/53022 (2015.01); Y10T 29/53052 (2015.01); Y10T 29/53061 (2015.01); Y10T 29/53087 (2015.01); Y10T 29/53091 (2015.01); Y10T 279/21 (2015.01);
Abstract

Exemplary embodiments of the invention disclose an exposure apparatus and a method of tuning parameters of a chuck, which may reduce a time taken to level the chuck by previously tuning parameters of the chuck. The method of tuning parameters of a chuck includes detecting a tilt component of the chuck, performing chuck tilt adjustment to minimize the tilt component of the chuck, and tuning the parameters of the chuck if a residual tilt component is present after performing the chuck tilt adjustment.

Find Patent Forward Citations

Kim, Ja. (2016). Apparatus and method of controlling chuck, and exposure apparatus and control method thereof (U.S. Patent No. 9287155). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9287155

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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