The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2016

Filed:

Dec. 27, 2011
Applicant:

Mitsuru Shimamoto, Tsu, JP;

Inventor:
Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 9/10 (2006.01); H01L 21/677 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/677 (2013.01); B25J 9/106 (2013.01); B25J 9/1065 (2013.01); B25J 11/0095 (2013.01); H01L 21/67742 (2013.01);
Abstract

A wafer handling robot includes a body and an arm having a plurality of links. A wafer holder is provided on one end of the arm. A base of the arm serves as a drive link and is rotatably connected to the body. The arm is configured such that, when the drive link is rotated by a motor, the arm end is constrained to move along a straight or curved trajectory. A starting point and an end point of the trajectory are located equal distantly from a center of rotation of the drive link. Further, the direction of the arm end at the starting point is a mirror image of the direction of the arm end at the end point with respect to a straight reference line passing through the center of rotation and a middle point between the starting and the end points.


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