The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
Aug. 31, 2011
Naoki Uchida, Tamano, JP;
Naoki Uchida, Tamano, JP;
Mitsui Engineering & Shipbuilding Co., Ltd., Tokyo, JP;
Abstract
To provide an induction heating apparatus that employs a batch-type heating system for heating a large-diameter wafer and can perform uniform heating with a high precision, an induction heating apparatus () that heats an inductive-heating target member using a magnetic flux generated from a solenoid-type induction heating coil () and heats a wafer () using the heat generated from the inductive-heating target member, wherein a plurality of inductive-heating target members(, and) of which principal surface is arranged perpendicularly to a core axis direction of the induction heating coil () are interspersed. In the induction heating apparatus () described above, a susceptor () may be configured by housing the inductive-heating target member () in a single holder () made of a member having magnetic permeability and heat conductivity.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile