The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
Dec. 03, 2013
Applicant:
Kabushiki Kaisha Toshiba, Minato-Ku, Tokyo, JP;
Inventor:
Haruko Akutsu, Yokosuka, JP;
Assignee:
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/16 (2006.01); H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
H01J 49/164 (2013.01); H01J 49/0027 (2013.01); H01J 49/0004 (2013.01);
Abstract
A material inspection apparatus according to the present embodiment includes a sample mount capable of mounting a sample. A detector detects an atom desorbed from the sample. A voltage generator applies a voltage to the sample. A laser generator irradiates a laser beam onto the sample. An arithmetic part processes a detection result of the detector. A storage part stores a detection prediction range of a certain element and an isotope of the certain element. A display displays the detection prediction range and an actual detection result of the detector in a comparable manner.