The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
Mar. 07, 2012
Applicant:
Tomohiro Saito, Yokohama, JP;
Inventor:
Tomohiro Saito, Yokohama, JP;
Assignee:
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01G 5/18 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
H01G 5/18 (2013.01); B81C 1/00611 (2013.01); B81B 2201/018 (2013.01); B81B 2201/0221 (2013.01); B81B 2203/0109 (2013.01); B81C 2201/0126 (2013.01);
Abstract
According to one embodiment, a MEMS includes a first electrode, a first auxiliary structure and a second electrode. The first electrode is provided on a substrate. The first auxiliary structure is provided on the substrate and adjacent to the first electrode. The first auxiliary structure is in an electrically floating state. The second electrode is provided above the first electrode and the first auxiliary structure, and is driven in a direction of the first electrode.