The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Oct. 26, 2009
Applicants:
Roel Daamen, Herkenbosch, NL;
Matthias Merz, Leuven, BE;
Inventors:
Roel Daamen, Herkenbosch, NL;
Matthias Merz, Leuven, BE;
Assignee:
NXP B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01); H01L 21/768 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76849 (2013.01); H01L 21/32134 (2013.01); H01L 21/7684 (2013.01); H01L 21/76883 (2013.01);
Abstract
A biocompatible electrode is manufactured by depositing filling metaland etching back the filling metal to the surface of the surrounding insulator. Then, a further etch forms a recessat the top of the via. An electrode metalis then deposited and etched back to fill the recessand form biocompatible electrode. In this way, a planar biocompatible electrode is achieved. The step of etching to form the recess may be carried out in the same CMP tool as is used to etch back the filling metal. A hydrogen peroxide etch may be used.