The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 08, 2016

Filed:

Dec. 19, 2012
Applicant:

Maxim Integrated Products, Inc., San Jose, CA (US);

Inventors:

Alessandro Rocchi, Rosignano Solvay, IT;

Eleonora Marchetti, San Giovanni La Punta, IT;

Lorenzo Bertini, Pisa, IT;

Assignee:

Maxim Integrated Products, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01C 19/04 (2006.01); G01C 19/5712 (2012.01);
U.S. Cl.
CPC ...
G01C 19/04 (2013.01); G01C 19/5712 (2013.01); Y10T 74/1293 (2015.01);
Abstract

A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass () disposed in an X-Y plane parallel to the substrate. Each driving mass () being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses () about the drive axis (Z) at each central suspension. At least one elastic connecting element () is disposed on each of the driving masses () on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses () in a mutually tuned manner.


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