The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Jun. 01, 2010
Takahiro Shirahata, Tokyo, JP;
Hiroyuki Orita, Tokyo, JP;
Akio Yoshida, Tokyo, JP;
Shizuo Fujita, Kyoto, JP;
Toshiyuki Kawaharamura, Kochi, JP;
Takahiro Shirahata, Tokyo, JP;
Hiroyuki Orita, Tokyo, JP;
Akio Yoshida, Tokyo, JP;
Shizuo Fujita, Kyoto, JP;
Toshiyuki Kawaharamura, Kochi, JP;
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION, Tokyo, JP;
KYOTO UNIVERSITY, Kyoto-shi, JP;
Abstract
A film forming apparatus includes a first solution container, a second solution container, a reaction chamber, a first path, and a second path. The first solution container stores a source solution containing metal. The second solution container stores hydrogen peroxide. A substrate is in the reaction chamber, and the reaction chamber includes a heating unit that heats the substrate. The first path supplies a source solution from the first solution container to the reaction chamber. The second path supplies hydrogen peroxide from the second solution container to the reaction chamber.