Photoacid generator compound, polymer comprising end groups containing the photoacid generator compound, and method of making

Abstract

A compound has formula (I): wherein in formula (I), Z is a y valent Corganic group, Aand Aare each independently ester containing or non-ester containing and are fluorinated or non-fluorinated, and are independently Calkylene, Ccycloalkylene, Carylene, or Caralkylene, and Acontains a nitrile, ester, or aryl substituent group alpha to the point of attachment with sulfur, L is a heteroatom or a single bond, Xis a single bond, —O—, —S—, —C(═O)—O—, —O—C(═O)—, —O—C(═O)—O—, —C(═O)—NR—, —NR—C(═O)—, —NR—C(═O)—NR—, —S(═O)—O—, —O—S(═O)—O—, —NR—S(═O)—, or —S(═O)—NR, wherein R is H, Calkyl, Ccycloalkyl or Caryl, Qis an anionic group, Gis a metallic or non-metallic cation, and y is an integer from 1 to 6. A polymer having end groups comprising the reaction product of the compound of formula (I), and a method of making a polymer, are also disclosed.