The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Jun. 15, 2012
James Robert Underbrink, Seattle, WA (US);
Mark Sheplak, Gainesville, FL (US);
Dylan Paul Alexander, Gainesville, FL (US);
Tiffany Nichole Reagan, Jacksonville, FL (US);
Jessica Caitlin Meloy, Valrico, FL (US);
James Robert Underbrink, Seattle, WA (US);
Mark Sheplak, Gainesville, FL (US);
Dylan Paul Alexander, Gainesville, FL (US);
Tiffany Nichole Reagan, Jacksonville, FL (US);
Jessica Caitlin Meloy, Valrico, FL (US);
The Boeing Company, Chicago, IL (US);
University of Florida Research Foundation, Incorporated, Gainesville, FL (US);
Abstract
A micro-sensor package is provided that includes a micro-sensor and printed circuit board (PCB), or that includes an array of micro-sensors and PCB. The micro-sensor includes a first substrate having opposing front and back surfaces, a sensing element on the front surface of the first substrate, and a through-chip via disposed within the first substrate and electrically connected to the sensing element. The PCB includes a second substrate to which the back surface of the first substrate is bonded. The second substrate defines a recess within which a bond pad is disposed, and the through-chip via of the micro-sensor is electrically connected to the bond pad of the PCB. The micro-sensor package may further include a shim bonded to the PCB, and that may surround an outer boundary of the micro-sensor and have approximately the same thickness as the micro-sensor.