The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Jan. 31, 2013
Applicant:
Fairchild Semiconductor Corporation, San Jose, CA (US);
Inventor:
Cenk Acar, Irvine, CA (US);
Assignee:
FAIRCHILD SEMICONDUCTOR CORPORATION, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); B81B 3/00 (2006.01); G01C 19/5712 (2012.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0018 (2013.01); B81B 3/0059 (2013.01); B81C 1/00134 (2013.01); G01C 19/56 (2013.01); G01C 19/5712 (2013.01); B81B 2201/0242 (2013.01); B81B 2203/0154 (2013.01);
Abstract
Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.