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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9277869 B1

PDFFull Text
Date of Patent:
Mar. 08, 2016

Filed:

Oct. 07, 2013

Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus

Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Katsuyuki Kurachi, Tokyo, JP;

Yasuhiro Aida, Tokyo, JP;

Hitoshi Sakuma, Tokyo, JP;

Kazuhiko Maejima, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Derek Rosenau

Int. Cl.
CPC ...
H01L 41/187 (2006.01); A61B 5/024 (2006.01); B41J 2/14 (2006.01); G01C 19/5621 (2012.01); G01L 9/00 (2006.01); G11B 5/55 (2006.01); H01L 41/08 (2006.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
A61B 5/02444 (2013.01); B41J 2/14233 (2013.01); G01C 19/5621 (2013.01); G01L 9/008 (2013.01); G11B 5/483 (2015.09); G11B 5/5552 (2013.01); H01L 41/0815 (2013.01); H01L 41/1873 (2013.01); H01L 41/316 (2013.01); B41J 2202/03 (2013.01);
Abstract

There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (KNaSr)(NbZr)Oand which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film piezoelectric sensor each including the thin-film piezoelectric element.

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Kurachi, Katsuyuki. (2016). Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus (U.S. Patent No. 9277869). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9277869

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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