The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Oct. 07, 2013
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Katsuyuki Kurachi, Tokyo, JP;
Yasuhiro Aida, Tokyo, JP;
Hitoshi Sakuma, Tokyo, JP;
Kazuhiko Maejima, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); A61B 5/024 (2006.01); B41J 2/14 (2006.01); G01C 19/5621 (2012.01); G01L 9/00 (2006.01); G11B 5/55 (2006.01); H01L 41/08 (2006.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
A61B 5/02444 (2013.01); B41J 2/14233 (2013.01); G01C 19/5621 (2013.01); G01L 9/008 (2013.01); G11B 5/483 (2015.09); G11B 5/5552 (2013.01); H01L 41/0815 (2013.01); H01L 41/1873 (2013.01); H01L 41/316 (2013.01); B41J 2202/03 (2013.01);
Abstract
There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (KNaSr)(NbZr)Oand which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film piezoelectric sensor each including the thin-film piezoelectric element.