logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9277596 B1

PDFFull Text
Expired
Date of Patent:
Mar. 01, 2016

Filed:

Jun. 24, 2013

Temperature control pin, and the device and method for supporting substrate in uv curing process

Applicant:

Shenzhen China Star Optoelectronics Technology Co., Ltd., Shenzhen, Guangdong, CN;

Inventors:

Tao Song, Shenzhen, CN;

Guodong Zhao, Shenzhen, CN;

Ming Liu, Shenzhen, CN;

Tao Ma, Shenzhen, CN;

Assignee:

Shenzhen China Star Optoelectronics Technology Co., Ltd., Shenzhen, Guangdong, CN;

Attorney:

Andrew C. Cheng

Primary Examiner:

Dana Ross

Assistant Examiner:

Lindsey C Teaters

Int. Cl.
CPC ...
F26B 3/30 (2006.01); A47J 39/00 (2006.01); F25B 29/00 (2006.01); H05B 3/00 (2006.01); H05B 1/02 (2006.01); H05B 3/02 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); G02F 1/13 (2006.01); G02F 1/1337 (2006.01);
U.S. Cl.
CPC ...
H05B 3/0047 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/6875 (2013.01); H05B 1/0233 (2013.01); H05B 3/02 (2013.01); G02F 1/1313 (2013.01); G02F 1/133788 (2013.01);
Abstract

A temperature control pin, and the device and the method for supporting a substrate in the ultraviolet (UV) solidifying alignment process are disclosed. The temperature control pins includes a supporting pin for supporting a substrate, a heater being arranged within the supporting pin and is close to a top of the supporting pin, and a cooling system. The heater is controlled by the temperature control system to heat up the supporting pin. The cooling system is controlled by the temperature control system to cool down the supporting pin, and cooperatively operates with the heater to dynamically adjust the temperature of the supporting pins. When being heated, the temperature of the temperature control pins is adjusted by the temperature control system, and the substrate is heated uniformly such that the 'Pin Mura' phenomenon is reduced or decreased.

Find Patent Forward Citations

Song, Tao. (2016). Temperature control pin, and the device and method for supporting substrate in uv curing process (U.S. Patent No. 9277596). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9277596

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…