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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9276504 B1

PDFFull Text
Date of Patent:
Mar. 01, 2016

Filed:

Feb. 28, 2013

Carrier device and ceramic member

Applicant:

Ngk Spark Plug Co., Ltd., Nagoya, Aichi, JP;

Inventors:

Kaname Miwa, Komaki, JP;

Tomonori Niwa, Ichinomiya, JP;

Jun Kurano, Kiyosu, JP;

Assignee:

NGK SPARK PLUG CO., LTD., Aichi, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Dean Kramer

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H02N 13/00 (2006.01); B25J 11/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); B25J 15/00 (2006.01); B25J 15/06 (2006.01);
U.S. Cl.
CPC ...
H02N 13/00 (2013.01); B25J 11/0095 (2013.01); B25J 15/0014 (2013.01); B25J 15/0085 (2013.01); B25J 15/0616 (2013.01); H01L 21/67103 (2013.01); H01L 21/67742 (2013.01); H01L 21/6833 (2013.01);
Abstract

A ceramic member, in a carrier device, includes: a plurality of ceramic layers that have insulating properties and are integrally sintered; a clamping electrode formed on a first ceramic layer among the plurality of ceramic layers and inside of the plurality of ceramic layers, and configured to attract a dielectric material by electrostatic force; a power feed port configured to receive a supply of electric power to the clamping electrode from outside of the ceramic member; a land formed on a second ceramic layer, which is different from the first ceramic layer among the plurality of ceramic layers, and configured to receive electric power through the power feed port; and a via arranged to pass through at least one of the plurality of ceramic layers and provided as a conductive material to electrically connect the clamping electrode with the land.

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