The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2016

Filed:

Nov. 29, 2011
Applicants:

Hongying Peng, Niskayuna, NY (US);

Robert Dwayne Gossman, Arvada, CO (US);

Juan Carlos Rojo, Niskayuna, NY (US);

Steven Jude Duclos, Clifton Park, NY (US);

Inventors:

Hongying Peng, Niskayuna, NY (US);

Robert Dwayne Gossman, Arvada, CO (US);

Juan Carlos Rojo, Niskayuna, NY (US);

Steven Jude Duclos, Clifton Park, NY (US);

Assignee:

First Solar, Inc., Tempe, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0224 (2006.01); H01L 31/0392 (2006.01); H01L 31/073 (2012.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/022466 (2013.01); H01L 31/03925 (2013.01); H01L 31/073 (2013.01); H01L 31/1884 (2013.01); Y02E 10/543 (2013.01); Y02P 70/521 (2015.11);
Abstract

A method of manufacturing a transparent oxide layer is provided. The manufacturing method includes disposing a cadmium tin oxide layer on a support, placing the support with the cadmium tin oxide layer within a chamber of a rapid thermal annealing system, and rapidly thermally annealing the cadmium tin oxide layer by exposing the cadmium tin oxide layer to electromagnetic radiation to form the transparent oxide layer, wherein the rapid thermal anneal is performed without first pumping down the chamber.


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