The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2016

Filed:

Mar. 19, 2012
Applicant:

Takeshi Uekido, Ube, JP;

Inventor:

Takeshi Uekido, Ube, JP;

Assignee:

UBE INDUSTRIES, LTD., Yamaguchi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29D 7/00 (2006.01); H01L 31/02 (2006.01); B29C 41/28 (2006.01); C08J 5/18 (2006.01); H01L 31/0392 (2006.01); B29K 79/00 (2006.01); B29C 35/08 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02 (2013.01); B29C 41/28 (2013.01); C08J 5/18 (2013.01); H01L 31/0392 (2013.01); B29C 2035/0822 (2013.01); B29K 2079/08 (2013.01); C08J 2379/08 (2013.01); Y02E 10/50 (2013.01);
Abstract

A polyimide film which rarely undergoes the formation of bubbles, blisters or the like, even when heated to a high temperature; and a production method and a production apparatus for the polyimide film. The polyimide film production apparatus includes a support body, a cast furnace and a cure furnace, wherein the cure furnace is partitioned into multiple zones so that the temperature of a self-supporting film can be increased in a stepwise manner, and an infrared electric heater, which is disposed at a predetermined distance from the film, is arranged in a zone for heating the atmosphere of the self-supporting film to a temperature of 450° C. or higher on the upper surface side and/or the lower surface side of the self-supporting film. The polyimide production apparatus enables the production of a polyimide film which has a volatile content of 0.1 mass % or less after being heated at 450° C. for 20 minutes.


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