The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Mar. 14, 2012
Applicants:
Mukul Khosla, San Jose, CA (US);
Ronald Powell, Portola Valley, CA (US);
Arun Keshavamurthy, Bangalore, IN;
Richard Blank, San Jose, CA (US);
Inventors:
Mukul Khosla, San Jose, CA (US);
Ronald Powell, Portola Valley, CA (US);
Arun Keshavamurthy, Bangalore, IN;
Richard Blank, San Jose, CA (US);
Assignee:
Novellus Systems, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); C23C 14/564 (2013.01); C23C 14/568 (2013.01);
Abstract
A substrate handling robot includes an arm section and a wrist portion connected to the arm section. An end effector is connected to the wrist portion and is configured to support a substrate. A housing is arranged adjacent to the end effector and includes a gas outlet that directs gas onto an exposed surface of the substrate during transport.