The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Feb. 09, 2015
Applicant:
Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;
Inventors:
Atsushi Uemoto, Tokyo, JP;
Tatsuya Asahata, Tokyo, JP;
Hidekazu Suzuki, Tokyo, JP;
Yo Yamamoto, Tokyo, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); G01N 1/32 (2006.01); H01J 37/18 (2006.01); H01J 37/28 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/18 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/063 (2013.01); H01J 2237/14 (2013.01); H01J 2237/182 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2806 (2013.01);
Abstract
A charged particle beam apparatus includes: a charged particle beam column; a detector configured to detect secondary charged particles; an image processor; a display device; a needle arranged in an irradiation area of charged particle beam; a needle actuator; a user interface; and a controller configured to control the needle actuator to actuate the needle in accordance with a target position that is set by the user interface. The controller controls the needle actuator to move the needle to track a change of the target position that is set by the user interface.