The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
May. 15, 2014
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Brennan J. Brown, Burlington, VT (US);
James R. Elliott, Richmond, VT (US);
Qizhi Liu, Lexington, MA (US);
Steven M. Shank, Jericho, VT (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/12 (2006.01); G02B 6/125 (2006.01); G02B 6/132 (2006.01); G02B 6/136 (2006.01); H01L 31/0232 (2014.01); H01L 33/58 (2010.01);
U.S. Cl.
CPC ...
G02B 6/125 (2013.01); G02B 6/132 (2013.01); G02B 6/136 (2013.01); H01L 31/02327 (2013.01); H01L 33/58 (2013.01);
Abstract
Si waveguide devices on a bulk Si substrate with supporting anchors and methods of manufacture are disclosed. The method includes forming a waveguide device over an Si substrate, and forming one or more anchors from the Si substrate. The one or more anchors support the waveguide device.