The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Nov. 22, 2010
Bojan Mitrovic, Somerset, NJ (US);
Alex Gurary, Bridgewater, NJ (US);
Eric A. Armour, Pennington, NJ (US);
Bojan Mitrovic, Somerset, NJ (US);
Alex Gurary, Bridgewater, NJ (US);
Eric A. Armour, Pennington, NJ (US);
Veeco Instruments Inc., Plainview, NY (US);
Abstract
An MOCVD reactor such as a rotating disc reactor () is equipped with a gas injector head having diffusers () disposed between adjacent gas inlets. The diffusers taper in the downstream direction. The injector head desirably has inlets () for a first gas such as a metal alkyl disposed in radial rows which terminate radially inward from the reactor wall to minimize deposition of the reactants on the reactor wall. The injector head desirably also has inlets () for a second gas such as ammonia arranged in a field between the rows of first gas inlets, and additionally has a center inlet () for the second gas coaxial with the axis of rotation.