The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Jan. 25, 2014
Yuri Glukhoy, San Francisco, CA (US);
Yuri Glukhoy, San Francisco, CA (US);
Other;
Abstract
A torch system for deposition of protective coatings on the walls of holes and recesses on the surface of showerheads includes a capacitive coupling plasma processing apparatuses. The system comprises an atmospheric-pressure inductively coupled plasma reactor for the formation of a plasma torch, a showerhead holder for moving the showerhead relative to the tip of the torch during deposition of the protective coating, and a plasma torch focusing device for squeezing and focusing the tip of the torch to cross-sectional dimensions comparable with the diameters of the gas holes of the showerhead which may be as small as 0.5 mm. The focusing device is moveable relative to the plasma reactor and the treated object in the direction perpendicular to the surface of the object. The movements of the showerhead and of the focusing device relative to the treated surface are automatically adjusted through feedbacks for maintaining the torch tip at optimal parameters.