The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Mar. 10, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Young Jin Choi, San Jose, CA (US);
Beom Soo Park, San Jose, CA (US);
Soo Young Choi, Fremont, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 51/52 (2006.01); H01L 33/52 (2010.01); H01L 33/44 (2010.01); H01L 33/56 (2010.01);
U.S. Cl.
CPC ...
H01L 51/5253 (2013.01); H01L 33/0075 (2013.01); H01L 33/44 (2013.01); H01L 33/52 (2013.01); H01L 33/56 (2013.01);
Abstract
A method and apparatus for depositing an inorganic layer onto a substrate is described. The inorganic layer may be part of an encapsulating film utilized in various display applications. The encapsulating film includes one or more inorganic layers as barrier layers to improve water-barrier performance. An oxygen containing gas, such as nitrous oxide, is introduced during the deposition of the inorganic layer. As a result, the inorganic layer is lower in stress and may obtain a water vapor transmission rate (WVTR) of less than 100 mg/m-day.