The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Feb. 07, 2014
Applicant:
Toyoda Gosei Co., Ltd., Kiyosu-shi, JP;
Inventors:
Masayoshi Kosaki, Kiyosu, JP;
Takahiro Fujii, Kiyosu, JP;
Assignee:
Toyoda Gosei Co., Ltd., Kiyosu-shi, Aichi-ken, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/20 (2006.01); H01L 21/02 (2006.01); H01L 29/872 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/2003 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02389 (2013.01); H01L 21/02458 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 29/66522 (2013.01); H01L 29/872 (2013.01);
Abstract
A semiconductor apparatus includes a semiconductor substrate that has a diameter of 2 inches or larger, and an N-type semiconductor layer that is stacked on the semiconductor substrate using a material including gallium nitride (GaN). A median of a plurality of measured values of the concentration of carbon (C) at a plurality of locations on a face of a region of the N-type semiconductor layer is equal to or lower than 1.0×10cm. The maximum value in difference between the median and the other measured values is lower than 5×10cm.