The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Nov. 12, 2013
Texas Instruments Incorporated, Dallas, TX (US);
Stephen Alan Keller, Plano, TX (US);
Michael LeRoy Huber, Sachse, TX (US);
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Abstract
An integrated circuit contains a high precision capacitor having a bottom plate, a dielectric layer over the bottom plate, a capacitor opening in the dielectric layer exposing, and not overlapping, the bottom plate, a capacitor dielectric layer covering sidewalls and a bottom of the capacitor opening, a top plate covering the capacitor dielectric layer in the capacitor opening, and a capacitor planarizing dielectric layer covering the capacitor top plate in the capacitor opening. A top surface of the capacitor planarizing dielectric layer and a top edge of the capacitor top plate are substantially coplanar. The top plate does not extend laterally beyond the capacitor opening. A method of forming the integrated circuit the high precision capacitor is also disclosed.